A SURFACE MICROMACHINED CAPACITIVE ABSOLUTE PRESSURE SENSOR ARRAY ON A GLASS SUBSTRATE

被引：17
|
作者：
HABIBI, M
LUEDER, E
KALLFASS, T
HORST, D
机构：
[1] Institut für Netzwerk- und Systemtheorie, Universität Stuttgart, Stuttgart, 70550
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 46卷 / 1-3期
关键词：
CAPACITIVE SENSORS; PRESSURE SENSORS; SENSOR ARRAYS; SURFACE MICROMACHINING;
D O I：
10.1016/0924-4247(94)00874-H
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The fabrication process and the characteristics of a new surface micromachined pressure sensor array on a glass substrate are presented. The array consists of electrically parallel individual sensors with composite SiO2-Cr-SiO2 diaphragms and vacuum-sealed cavities underneath. The cavities are created by lateral etching of an Al sacrificial layer. Capacitive sensing of pressure is accomplished via chromic electrodes. The performance of the sensor array is described. In a pressure range of 800 kPa a terminal-based nonlinearity less than 4% was measured for the arrays. The pressure sensitivity of the array is about 0.28 fF hPa(-1).
引用
收藏
页码：125 / 128
页数：4
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