THE INTERACTION OF LOW-ENERGY ION-BEAMS WITH SURFACES

被引：72
|
作者：
CARTER, G
ARMOUR, DG
机构：
来源：
THIN SOLID FILMS | 1981年 / 80卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(81)90202-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：13 / 30
页数：18
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