COMPUTATION OF MAGNETIC DEFLECTORS FOR ELECTRON-BEAM LITHOGRAPHY

被引：10

作者：

LENCOVA, B ^{[1
]}

LENC, M ^{[1
]}

VANDERMAST, KD ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT APPL PHYS,2628 CJ DELFT,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584678

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1846 / 1850

页数：5

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