AN XPS STUDY OF THE INITIAL-STAGES OF OXIDATION OF HAFNIUM

被引：121
|
作者：
MORANT, C
GALAN, L
SANZ, JM
机构：
[1] Departamento de Física Aplicada, Universidad Autónoma de Madrid, Madrid
来源：
SURFACE AND INTERFACE ANALYSIS | 1990年 / 16卷 / 1-12期
关键词：
D O I：
10.1002/sia.740160163
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The oxidation kinetics of polycrystalline hafnium (Hf) at room temperature and low oxygen pressure (Po2 ∼ 10−7 Torr) has been studied by x‐ray photoelectron spectroscopy (XPS). After a chemisorption stage for exposures ⩽ 5 L, Hf suboxides are initially formed and are dominant until ∼ 25 L. HfO2 appears at ∼ 10 L. Above 25 L, HfO2 grows by oxidation of the suboxides, whereas the oxide film thickness remains constant. Above 500 L, a saturation region is observed that corresponds to an oxide layer of 12 Å thick with an average composition HfO1.8. Copyright © 1990 John Wiley & Sons Ltd.
引用
收藏
页码：304 / 308
页数：5
相关论文
共 50 条
  • [31] INITIAL-STAGES OF OXIDATION OF COPPER AND COPPER-IRON ALLOY
    HONO, K
    SAKURAI, T
    PICKERING, HW
    JOURNAL DE PHYSIQUE, 1987, 48 (C-6): : 505 - 510
  • [32] INITIAL-STAGES OF OXIDATION OF SI(100)(2X1) - A COMBINED VIBRATIONAL (EELS) AND ELECTRON-BINDING ENERGY (XPS) STUDY
    SCHAEFER, JA
    GOPEL, W
    SURFACE SCIENCE, 1985, 155 (2-3) : 535 - 552
  • [33] A STUDY OF THE INITIAL-STAGES OF THE OXIDATION OF SILICON USING O-18(2) AND RTP
    GANEM, JJ
    BATTISTIG, G
    RIGO, S
    TRIMAILLE, I
    APPLIED SURFACE SCIENCE, 1993, 65-6 : 647 - 653
  • [34] INITIAL-STAGES OF BISMUTH DEPOSITION
    PATEL, AR
    RAO, KV
    SHIVAKUMAR, GK
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 47 (01): : K1 - &
  • [35] INITIAL-STAGES OF EUTECTIC SOLIDIFICATION
    LEMAIGNAN, C
    ACTA METALLURGICA, 1981, 29 (08): : 1379 - 1384
  • [36] INITIAL-STAGES OF MICROFRACTION EVOLUTIONS
    KRIVOBODROV, VS
    ORLOV, AN
    ZHURNAL TEKHNICHESKOI FIZIKI, 1985, 55 (08): : 1677 - 1679
  • [37] INITIAL-STAGES OF GONADAL DIFFERENTIATION
    MAGRE, S
    FRIDMACHER, V
    CONTRACEPTION FERTILITE SEXUALITE, 1994, 22 (09): : 535 - 538
  • [38] INITIAL-STAGES OF EUTECTIC HARDENING
    PODOLINSKII, VV
    DRYKIN, VG
    ZHURNAL FIZICHESKOI KHIMII, 1986, 60 (10): : 2596 - 2598
  • [39] SI EJECTION AND REGROWTH DURING THE INITIAL-STAGES OF SI(001) OXIDATION
    CAHILL, DG
    AVOURIS, P
    APPLIED PHYSICS LETTERS, 1992, 60 (03) : 326 - 328
  • [40] INITIAL-STAGES OF FE(110) OXIDATION AT 300 K - KINETICS AND STRUCTURE
    WIGHT, A
    CONDON, NG
    LEIBSLE, FM
    WORTHY, G
    HODGSON, A
    SURFACE SCIENCE, 1995, 331 : 133 - 137
12345