PAD MATERIALS FOR CHEMICAL-MECHANICAL POLISHING

被引：0
|
作者：
MENDEL, E [1 ]
KAPLAN, P [1 ]
PATSIS, A [1 ]
机构：
[1] IBM CORP, E FISHKILL FACIL, Hopewell Jct, NY 12533 USA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C128 / C128
页数：1
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