LOW-ENERGY BI CLUSTER BEAM DEPOSITION

被引：11
|
作者：
FUCHS, G
MONTANDON, C
TREILLEUX, M
DUMAS, J
CABAUD, B
MELINON, P
HOAREAU, A
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1993年 / 26卷 / 07期
关键词：
D O I：
10.1088/0022-3727/26/7/017
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Electrical and chemical properties of Bi films produced by low-energy cluster beam deposition (LECBD) are studied and compared with those of films made by molecular beam deposition (MBD). For LECBD Bi films, increase of roughness and decrease of film grain size explain increase of resistivity and chemical reactivity to oxygen. Two phenomena are proposed to play a role in LECBD film growth: low surface diffusion of Bi clusters (relative to Bi2) and a high barrier to cluster coalescence. The present experiments show that growth of LECBD crystallized Bi films and the film grain size can be controlled by the size distribution of incident clusters.
引用
收藏
页码：1114 / 1119
页数：6
相关论文
共 50 条
  • [21] NANOCRYSTALLIZED THIN-FILMS OF TRANSITION-METAL OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION
    DUPUIS, V
    PEREZ, JP
    TUAILLON, J
    PAILLARD, V
    MELINON, P
    GUIRAUD, G
    DUPIN, JP
    PEREZ, A
    THOMAS, L
    BARBARA, B
    BOUCHET, B
    SCRIPTA METALLURGICA ET MATERIALIA, 1995, 33 (10-11): : 1563 - 1568
  • [22] Giant magnetoresistance in Co-Ag granular films prepared by low-energy cluster beam deposition
    Parent, F
    Tuaillon, J
    Stern, LB
    Dupuis, V
    Prevel, B
    Perez, A
    Melinon, P
    Guiraud, G
    Morel, R
    Barthelemy, A
    Fert, A
    PHYSICAL REVIEW B, 1997, 55 (06): : 3683 - 3687
  • [23] Formation, evolution, and degradation of nanostructured covalent thin films deposited by low-energy cluster beam deposition
    D'Urso L.
    Scalisi A.A.
    Altamore C.
    Compagnini G.
    Journal of Materials Research, 2006, 21 (7) : 1638 - 1644
  • [24] Formation, evolution, and degradation of nanostructured covalent thin films deposited by low-energy cluster beam deposition
    D'Urso, Luisa
    Scalisi, A. Alessandro
    Altamore, Corinna
    Compagnini, Giuseppe
    JOURNAL OF MATERIALS RESEARCH, 2006, 21 (07) : 1638 - 1644
  • [25] MAGNETIC-PROPERTIES OF NANOSTRUCTURED IRON FILMS OBTAINED BY LOW-ENERGY NEUTRAL CLUSTER BEAM DEPOSITION
    PEREZ, JP
    DUPUIS, V
    TUAILLON, J
    PEREZ, A
    PAILLARD, V
    MELINON, P
    TREILLEUX, M
    THOMAS, L
    BARBARA, B
    BOUCHETFABRE, B
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 145 (1-2) : 74 - 78
  • [26] LOW-ENERGY DOUBLE-ION-BEAM DEPOSITION SYSTEM
    YOSHIDA, Y
    OHNISHI, T
    SEKIHARA, T
    HIROFUJI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (01): : 140 - 143
  • [27] Study of Icaritin Films by Low-Energy Electron Beam Deposition
    Cheng, Tongfei
    Cao, Jinxing
    Jiang, Xiaohong
    Yarmolenko, M. A.
    Rogachev, A. A.
    Rogachev, A. V.
    EURASIAN CHEMICO-TECHNOLOGICAL JOURNAL, 2021, 23 (02) : 77 - 87
  • [28] DC CONDUCTION IN DIAMOND-LIKE CARBON-FILMS OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION
    PAILLARD, V
    MEAUDRE, M
    MELINON, P
    DUPUIS, V
    PEREZ, JP
    VIGNOLI, S
    PEREZ, A
    MEAUDRE, R
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 191 (1-2) : 174 - 183
  • [29] NEW NANOCRYSTALLIZED THIN-FILMS OF TRANSITION-METAL OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION
    DUPUIS, V
    TUAILLON, J
    PEREZ, JP
    PAILLARD, V
    PEREZ, A
    MELINON, P
    THOMAS, L
    BARBARA, B
    BOUCHET, B
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 148 (1-2) : 1 - 3
  • [30] SYNTHESIS OF DIAMOND NANOCRYSTALLITES USING THE LOW-ENERGY CLUSTER BEAM DEPOSITION - AN INDIRECT PROOF OF SMALL FULLERENE EXISTENCE
    MELINON, P
    PAILLARD, V
    DUPUIS, V
    PEREZ, JP
    PEREZ, A
    PANCZER, G
    CARBON, 1994, 32 (05) : 1011 - 1013
12345