MEASUREMENT METHOD OF ADHESION STRENGTH BETWEEN INORGANIC MATERIALS AND POLYMER BY USING ATOMIC-FORCE MICROSCOPY

被引：0

作者：

KAWAI, A ^{[1
]}

NAGATA, H ^{[1
]}

TAKATA, M ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CORP,ULSI LAB,ITAMI,HYOGO 664,JAPAN

来源：

NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 1994年 / 102卷 / 12期

关键词：

ATOMIC FORCE MICROSCOPY; SURFACE FORCE; ADHESION; ELASTIC ENERGY; DESTRUCTION; PHOTORESIST; CANTILEVER TIP;

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A new application of the interaction phenomenon between tip and surface to practical adhesive behavior is studied. The interactive energy between two films can be estimated from the measured data of attractive force by atomic force microscopy (AFM). The adhesive strength between inorganic materials and polymer is closely related to the estimated value of interactive energy. The adhesive strength can be estimated by using a nondestructive method.

引用

页码：1102 / 1104

页数：3

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