DEPOSITION OF SNO2 FILMS WITH CONTROLLED GRAIN-SIZE

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作者
KUKUEV, VI [1 ]
SOROKINA, EA [1 ]
TOMASHPOLSKII, YY [1 ]
MALYGIN, MV [1 ]
SUROVTSEV, IS [1 ]
LESOVOI, MV [1 ]
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[1] LY KARPOV PHYS CHEM RES INST, MOSCOW 103064, RUSSIA
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T [工业技术];
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08 ;
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页码:317 / 319
页数:3
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