GRAIN-BOUNDARY DIFFUSION CONTROL OF CU FILMS PREPARED BY THE ICB TECHNIQUE

被引：12

作者：

TAKAOKA, GH ^{[1
]}

FUJITA, K ^{[1
]}

ISHIKAWA, J ^{[1
]}

TAKAGI, T ^{[1
]}

机构：

[1] KYOTO UNIV,DEPT ELECTR,SAKYO KU,KYOTO 606,JAPAN

来源：

关键词：

D O I：

10.1016/0168-583X(89)90320-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：882 / 885

页数：4

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