GRAIN-BOUNDARY DIFFUSION CONTROL OF CU FILMS PREPARED BY THE ICB TECHNIQUE

被引：12
|
作者：
TAKAOKA, GH [1 ]
FUJITA, K [1 ]
ISHIKAWA, J [1 ]
TAKAGI, T [1 ]
机构：
[1] KYOTO UNIV,DEPT ELECTR,SAKYO KU,KYOTO 606,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
关键词：
D O I：
10.1016/0168-583X(89)90320-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：882 / 885
页数：4
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