ION IMPLANT PROFILES IN GARNET-FILMS

被引：16

|

作者：

WASHBURN, HA

GALLI, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 03期

关键词：

D O I：

10.1063/1.327021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2267 / 2269

页数：3

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