ION IMPLANT PROFILES IN GARNET-FILMS

被引：16
|
作者：
WASHBURN, HA
GALLI, G
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 03期
关键词：
D O I：
10.1063/1.327021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2267 / 2269
页数：3
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