ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY

被引：160

|

作者：

TARNG, ML

WEHNER, GK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 06期

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D O I：

10.1063/1.1660561

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2449 / &

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