LITHIUM-NIOBATE RIDGE WAVE-GUIDES FABRICATED BY WET ETCHING

被引：29
|
作者：
LEE, HJ
SHIN, SY
机构：
[1] Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, 373-1, Kusong-Dong, Yusung-Gu
来源：
ELECTRONICS LETTERS | 1995年 / 31卷 / 04期
关键词：
ETCHING; LITHIUM NIOBATE; OPTICAL WAVE-GUIDES; ION;
D O I：
10.1049/el:19950195
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The authors report a novel method for fabricating proton exchanged LiNbO3 ridge waveguides by the wet etching of proton-exchanged LiNbO3. To demonstrate a simple and easy application of the LiNbO3 ridge waveguide, a Mach-Zehnder interferometric modulator with a selfaligned electrode was fabricated.
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页码：268 / 269
页数：2
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