CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDY OF THE GROWTH-KINETICS OF HEXAGONAL MOSI2 ON (001)SI

被引：38
|
作者：
CHENG, JY [1 ]
CHENG, HC [1 ]
CHEN, LJ [1 ]
机构：
[1] NATL CHIAO TUNG UNIV,DEPT ELECTR ENGN,HSINCHU,TAIWAN
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 06期
关键词：
D O I：
10.1063/1.337982
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2218 / 2223
页数：6
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