AUGER ANALYSIS OF NI/AU/TE AND AU/TE OHMIC CONTACTS ON N-GAAS

被引：2
|
作者：
BENDER, H
WUYTS, K
WATTE, J
SILVERANS, RE
机构：
[1] KATHOLIEKE UNIV LEUVEN,DEPT PHYS,INST KERN STRALINGSFYS,B-3001 LOUVAIN,BELGIUM
[2] KATHOLIEKE UNIV LEUVEN,DEPT PHYS,VASTE STOF FYS MAGNITISME,B-3001 LOUVAIN,BELGIUM
来源：
SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期
关键词：
D O I：
10.1002/sia.740190160
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The characterization of Ni/Au/Te and Au/Te contacts on n-GaAs by Auger electron spectroscopy is studied by surface element mapping and depth profiling. Owing to the high lateral resolution of AES, important characteristics of these metallization schemes, which could not be detected by any other technique, are revealed. Comparison with other analysis techniques is performed, yielding important insight into the mechanism of ohmic conductivity.
引用
收藏
页码：318 / 324
页数：7
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