METAL SPUTTERING BY CATHODE SPOT OF A VACUUM ARC

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KLYARFELD, BN
NERETINA, NA
DRUZHINI.NN
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SOVIET PHYSICS TECHNICAL PHYSICS-USSR | 1969年 / 14卷 / 06期
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O59 [应用物理学];
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页码：796 / +
页数：1
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