SURFACE PHOSPHIDATION OF GAAS BY THE LASER-INDUCED DISSOCIATION OF TRIMETHYLPHOSPHINE

被引：0

作者：

DAVIDSON, JL ^{[1
]}

JOHN, P ^{[1
]}

ROBERTS, PG ^{[1
]}

JUBBER, MG ^{[1
]}

WILSON, JIB ^{[1
]}

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 11期

关键词：

D O I：

10.1063/1.112063

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The localized phosphidation of single-crystal GaAs, by the frequency doubled argon ion laser photolysis at 257 nm Of P(CH3)3, is reported. Tracks were deposited by scanning the focused laser beam at a speed of 34.6 mum s-1 and were characterized by scanning electron microscopy and laser ionization mass analysis. Evidence is presented which suggests that a photochemical reaction is initiated by band gap absorption by GaAs.

引用

页码：1397 / 1399

页数：3

共 50 条

[1] A NEW TYPE OF LASER-INDUCED SURFACE DAMAGE OF GAAS
OKIGAWA, M
NAKAYAMA, T
TAKAYAMA, K
ITOH, N
SOLID STATE COMMUNICATIONS, 1984, 49 (04) : 347 - 349
[2] LASER-INDUCED INTERACTION OF AMMONIA WITH GAAS(100) .1. DISSOCIATION AND NITRIDATION
ZHU, XY
WOLF, M
HUETT, T
WHITE, JM
JOURNAL OF CHEMICAL PHYSICS, 1992, 97 (08): : 5856 - 5867
[3] Laser-induced reactivity of NH3 on GaAs surface
Vivet, L
Dubreuil, B
GibertLegrand, T
Barthe, MF
Perrin, C
JOURNAL DE PHYSIQUE III, 1997, 7 (01): : 87 - 98
[4] LASER-INDUCED DOPING OF GAAS
KRAUTLE, H
ROENTGEN, P
MAIER, M
BENEKING, H
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 38 (01): : 49 - 56
[5] LASER-INDUCED LUMINESCENCE AND DISSOCIATION IN BIPHENYL
EISENTHA.KB
PETICOLA.WL
RIECKHOF.KE
JOURNAL OF CHEMICAL PHYSICS, 1966, 44 (12): : 4492 - +
[6] Laser-induced phase transformations in GaAs
Zhvavyi, SP
Ivlev, GD
Gatskevich, EI
Sharaev, DN
LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES, 2003, 5121 : 64 - 67
[7] LASER-INDUCED DEGRADATION OF GAAS PHOTOLUMINESCENCE
RAJA, MYA
BRUECK, SRJ
OSINSKI, M
MCINERNEY, J
APPLIED PHYSICS LETTERS, 1988, 52 (08) : 625 - 627
[8] Laser-induced damage studies in GaAs
Garg, A
Kapoor, A
Tripathi, KN
OPTICS AND LASER TECHNOLOGY, 2003, 35 (01): : 21 - 24
[9] LASER-INDUCED RECRYSTALLIZATION AND DAMAGE IN GAAS
TSU, R
BAGLIN, JE
LASHER, GJ
TSANG, JC
APPLIED PHYSICS LETTERS, 1979, 34 (02) : 153 - 155
[10] PHASE-DISSIPATIVE MECHANISMS FOR LASER-INDUCED SURFACE DESORPTION DISSOCIATION PROCESSES
HUANG, XY
GEORGE, TF
YUAN, JM
NARDUCCI, LM
JOURNAL OF PHYSICAL CHEMISTRY, 1984, 88 (24): : 5772 - 5774

← 1 2 3 4 5 →