EVOLUTION OF OPTICAL THIN-FILMS BY SPUTTERING

被引：45
|
作者：
COLEMAN, WJ [1 ]
机构：
[1] BATTELLE PACIFIC NORTHWEST LABS,RICHLAND,WA 99352
来源：
APPLIED OPTICS | 1974年 / 13卷 / 04期
关键词：
D O I：
10.1364/AO.13.000946
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：946 / 951
页数：6
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