INTERNAL STRESSES IN THIN FILMS

被引：0
|
作者：
HOFFMAN, RW
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C212 / &
相关论文
共 50 条
  • [21] STRESSES IN THIN FILMS OF ALUMINUM
    CASTRO, PL
    CAMPBELL, JF
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (11) : C323 - &
  • [22] EFFECTS OF SOME ELECTROLYSIS PARAMETERS ON THE INTERNAL-STRESSES OF THIN PERMALLOY-FILMS
    BELTOWSKALEHMAN, E
    RIESENKAMPF, A
    TOPOLNICKI, J
    SURFACE TECHNOLOGY, 1981, 12 (02): : 157 - 161
  • [23] The effects of thickness and underlayer on both grain growth and internal stresses in Cu thin films
    Takayama, S
    Oikawa, M
    NEW FRONTIERS OF PROCESSING AND ENGINEERING IN ADVANCED MATERIALS, 2005, 502 : 417 - 422
  • [24] The combined effect of surface roughness and internal stresses on nanoindentation tests of polysilicon thin films
    Wang, Quan
    Hu, Ran
    Shao, Ying
    JOURNAL OF APPLIED PHYSICS, 2012, 112 (04)
  • [25] An Influence of Mechanical Stresses on the Magnitude of the Internal Field in Lead Zirconate Titanate Thin Films
    A. R. Valeeva
    E. Yu. Kaptelov
    S. V. Senkevich
    I. P. Pronin
    S. A Nemov
    V. P. Pronin
    Technical Physics Letters, 2023, 49 : S295 - S298
  • [26] Dependence of dielectric properties on internal stresses in epitaxial barium strontium titanate thin films
    Li, H
    Roytburd, AL
    Alpay, SP
    Tran, TD
    Salamanca-Riba, L
    Ramesh, R
    APPLIED PHYSICS LETTERS, 2001, 78 (16) : 2354 - 2356
  • [27] An Influence of Mechanical Stresses on the Magnitude of the Internal Field in Lead Zirconate Titanate Thin Films
    Valeeva, A. R.
    Kaptelov, E. Yu.
    Senkevich, S. V.
    Pronin, I. P.
    Nemov, S. A.
    Pronin, V. P.
    TECHNICAL PHYSICS LETTERS, 2023, 49 (SUPPL 3) : S295 - S298
  • [28] MEASUREMENT OF INTERNAL-STRESSES IN FILMS
    CHETVERIKOV, NI
    SERZHANTOV, AM
    CHERNYAEV, VN
    INDUSTRIAL LABORATORY, 1980, 46 (01): : 87 - 89
  • [29] Stresses in thin films and interconnect lines
    Gudmundson, P
    Wikström, A
    MICROELECTRONIC ENGINEERING, 2002, 60 (1-2) : 17 - 29
  • [30] Stresses in thin Au films on γ alumina
    Gillet, M
    Assaban, A
    Mikaelian, G
    VACUUM, 1998, 50 (1-2) : 73 - 78
12345