BEHAVIOR OF CHARGED-PARTICLES IN SCANNING ELECTRON-MICROSCOPE

被引：3

|

作者：

KRAKOW, W

NIXON, WC

机构：

[1] XEROX CORP,TRANSMISSION MICROSCOPY GRP,ROCHESTER,NY 14644

[2] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE,ENGLAND

来源：

IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS | 1977年 / 13卷 / 04期

关键词：

D O I：

10.1109/TIA.1977.4503419

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：355 / 366

页数：12

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