BEHAVIOR OF CHARGED-PARTICLES IN SCANNING ELECTRON-MICROSCOPE

被引：3
|
作者：
KRAKOW, W
NIXON, WC
机构：
[1] XEROX CORP,TRANSMISSION MICROSCOPY GRP,ROCHESTER,NY 14644
[2] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE,ENGLAND
来源：
IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS | 1977年 / 13卷 / 04期
关键词：
D O I：
10.1109/TIA.1977.4503419
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：355 / 366
页数：12
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