THERMAL-DEGRADATION OF TISI2/POLY-SI GATES

被引：0
|
作者：
NYGREN, S
NORSTROM, H
OSTLING, M
CHATFIELD, C
RYDEN, KH
BUCHTA, R
PETERSSON, CS
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：179 / 181
页数：3
相关论文
共 50 条
  • [31] CoSi2 and TiSi2 for Si/SiGe heterodevices
    Gluck, M
    Schuppen, A
    Rosler, M
    Heinrich, W
    Hersener, J
    Konig, U
    Yam, O
    Cytermann, C
    Eizenberg, M
    THIN SOLID FILMS, 1995, 270 (1-2) : 549 - 554
  • [32] 高温工艺对TiSi2/n+-Poly-Si复合栅MOS电容特性及TiSi2膜性质的影响
    陶江
    武国英
    张国炳
    陈文茹
    王阳元
    半导体学报, 1991, (06) : 367 - 372+390
  • [33] MORPHOLOGY AND PHASE-STABILITY OF TISI2 ON SI
    JEON, H
    SUKOW, CA
    HONEYCUTT, JW
    ROZGONYI, GA
    NEMANICH, RJ
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) : 4269 - 4276
  • [34] Electrical properties of nanoscale TiSi2 islands on Si
    Oh, JW
    Ham, H
    Laloli, P
    Nemanich, RJ
    SELF-ORGANIZED PROCESSES IN SEMICONDUCTOR ALLOYS, 2000, 583 : 111 - 116
  • [35] THERMAL-DEGRADATION OF POLYSILOXANES .2. POLY(METHYLPHENYLSILOXANE)
    GRASSIE, N
    MACFARLANE, IG
    FRANCEY, KF
    EUROPEAN POLYMER JOURNAL, 1979, 15 (05) : 415 - 422
  • [36] Microstructure and orientation of TiSi2 layers on (111) Si
    Ievlev, VM
    Kushchev, SB
    Soldatenko, SA
    Isaev, AY
    Rubtsov, VI
    INORGANIC MATERIALS, 2001, 37 (12) : 1256 - 1262
  • [37] Texture of TiSi2 thin films on Si (001)
    Ozcan, AS
    Ludwig, KF
    Rebbi, P
    Lavoie, C
    Cabral, C
    Harper, JME
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (09) : 5011 - 5018
  • [38] THERMAL-DEGRADATION OF POLY(2-METHOXYETHYL METHACRYLATE)
    ZULFIQAR, S
    AKHTAR, N
    ZULFIQAR, M
    MCNEILL, IC
    POLYMER DEGRADATION AND STABILITY, 1989, 23 (03) : 299 - 308
  • [39] Ion beam synthesis of TiSi2 in (100)Si and (111)Si
    Jin, S
    Chen, LJ
    MATERIALS CHEMISTRY AND PHYSICS, 1998, 54 (1-3) : 360 - 364
  • [40] THERMAL-DEGRADATION OF POLY(GLYCIDYL METHACRYLATE)
    ZULFIQAR, S
    ZULFIQAR, M
    NAWAZ, M
    MCNEILL, IC
    GORMAN, JG
    POLYMER DEGRADATION AND STABILITY, 1990, 30 (02) : 195 - 203
12345