INTENSIFICATION OF MICRO-ELECTRONIC PROCESSING TECHNIQUE USING MODELS AND OPTIMIZATION

被引：0
|
作者：
GRAUER, M
BERGMANN, S
RICHTER, L
机构：
[1] VEB KOMBINAT FUNKWERK,ERFURT,GER DEM REP
[2] TECH UNIV DRESDEN,DDR-8027 DRESDEN,GER DEM REP
[3] TH CARL SCHORLEMMER,DDR-42 LEUNA MERSEBURG,GER DEM REP
来源：
CHEMISCHE TECHNIK | 1978年 / 30卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
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页码：530 / 530
页数：1
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