INTENSIFICATION OF MICRO-ELECTRONIC PROCESSING TECHNIQUE USING MODELS AND OPTIMIZATION

被引：0

作者：

GRAUER, M

BERGMANN, S

RICHTER, L

机构：

[1] VEB KOMBINAT FUNKWERK,ERFURT,GER DEM REP

[2] TECH UNIV DRESDEN,DDR-8027 DRESDEN,GER DEM REP

[3] TH CARL SCHORLEMMER,DDR-42 LEUNA MERSEBURG,GER DEM REP

来源：

CHEMISCHE TECHNIK | 1978年 / 30卷 / 10期

关键词：

D O I：

暂无

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：530 / 530

页数：1

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