BARRIER METALS FOR ULSI - DEPOSITION AND MANUFACTURING

被引：0
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作者：
PRAMANIK, D
JAIN, V
机构：
来源：
SOLID STATE TECHNOLOGY | 1993年 / 36卷 / 01期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：73 / &
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