LIMITATIONS ON HIGH-TEMPERATURE PROCESSING OF ALUMINUM-COPPER METALLIZATION

被引：2
|
作者：
LEARN, AJ [1 ]
机构：
[1] FAIRCHILD CAMERA & INSTR CORP,RES & DEV LAB,PALO ALTO,CA 94304
来源：
PROCEEDINGS OF THE IEEE | 1973年 / 61卷 / 04期
关键词：
D O I：
10.1109/PROC.1973.9071
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：476 / 477
页数：2
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