SUPPRESSION OF HARD BUBBLES IN MAGNETIC GARNET FILMS BY ION-IMPLANTATION - DEPENDENCE ON ION SPECIES, DOSE, ENERGY, AND ANNEALING

被引:43
|
作者
WOLFE, R [1 ]
NORTH, JC [1 ]
LAI, YP [1 ]
机构
[1] BELL TEL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.1654552
中图分类号
O59 [应用物理学];
学科分类号
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页码:683 / 685
页数:3
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