A HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF THE FINE-STRUCTURE IN A TRENCH CAPACITOR

被引：4

作者：

SINCLAIR, R ^{[1
]}

KIM, KB ^{[1
]}

SHIPPOU, O ^{[1
]}

IWASAKI, H ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,SEMICOND RES CTR,MORIGUCHI,OSAKA 570,JAPAN

来源：

关键词：

D O I：

10.1149/1.2096672

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：511 / 518

页数：8

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