A HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF THE FINE-STRUCTURE IN A TRENCH CAPACITOR

被引：4
|
作者：
SINCLAIR, R [1 ]
KIM, KB [1 ]
SHIPPOU, O [1 ]
IWASAKI, H [1 ]
机构：
[1] MATSUSHITA ELECT IND CO LTD,SEMICOND RES CTR,MORIGUCHI,OSAKA 570,JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 02期
关键词：
D O I：
10.1149/1.2096672
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：511 / 518
页数：8
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