GLOW-DISCHARGE MASS-SPECTROMETRY OF SILICON DC SPUTTERING IN ARGON-HYDROGEN

被引：12

作者：

TARDY, J ^{[1
]}

POITEVIN, JM ^{[1
]}

LEMPERIERE, G ^{[1
]}

机构：

[1] UNIV NANTES,PHYS CORPUSCULAIRE LAB,F-44037 NANTES,FRANCE

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 02期

关键词：

D O I：

10.1088/0022-3727/14/2/025

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：339 / 346

页数：8

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