STRUCTURE OF W+-ION IMPLANTED AND ANNEALED SI-LAYERS

被引：0
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作者：
CHITKO, VI
KOMAROV, FF
SAMOILYUK, TT
SOLOVEV, VS
SHIRYAEV, SY
机构：
来源：
CRYSTAL LATTICE DEFECTS AND AMORPHOUS MATERIALS | 1986年 / 13卷 / 02期
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中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
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页码：85 / 89
页数：5
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