SHIVA AND ARGUS TARGET DIAGNOSTICS VACUUM-SYSTEMS

被引：0

作者：

GLAROS, SS

MAYO, SE

CAMPBELL, D

HOLEMAN, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

Compendex;

D O I：

10.1116/1.570055

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

VACUUM TECHNOLOGY

引用

页码：674 / 680

页数：7

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