OPTICAL-PROPERTIES AND AXIAL ABERRATION COEFFICIENTS OF THE CATHODE LENS IN COMBINATION WITH A FOCUSING LENS

被引:26
|
作者
LENC, M
MULLEROVA, I
机构
[1] Institute of Scientific Instruments, Czechoslovak Academy of Sciences, 612 64 Brno
关键词
D O I
10.1016/0304-3991(92)90047-N
中图分类号
TH742 [显微镜];
学科分类号
摘要
The analytical expression of the axial aberration coefficients of the cathode lens in combination with a focusing lens was derived and the values compared with those when only a cathode lens is used. For the real arrangement of the cathode lens in combination with a magnetic focusing single-polepiece lens the radius of the aberration disc is 7 nm for an electron energy of 10 eV and for an immersion ratio of 1000.
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页码:159 / 162
页数:4
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