MODELING PHYSICAL PROCESSES IN SILICON INTEGRATED-CIRCUIT FABRICATION

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作者：

GODFREY, DJ

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来源：

PHYSICS IN TECHNOLOGY | 1986年 / 17卷 / 06期

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D O I：

10.1088/0305-4624/17/6/I03

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

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页码：260 / &

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