MONOLITHIC INTEGRATION OF PHOTODETECTOR WITH VERTICAL CAVITY SURFACE EMITTING LASER

被引：26
|
作者：
HASNAIN, G
TAI, K
WANG, YH
WYNN, JD
CHOQUETTE, KD
WEIR, BE
DUTTA, NK
CHO, AY
机构：
[1] AT&T Bell Laboratories, NJ 07974, Murray Hill
来源：
ELECTRONICS LETTERS | 1991年 / 27卷 / 18期
关键词：
PHOTODETECTORS; SEMICONDUCTOR LASERS; INTEGRATED OPTICS;
D O I：
10.1049/el:19911019
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
For the first time, monolithic integration of a photodetector with a vertical-cavity surface emitting laser (VCSEL) is demonstrated. We have designed and fabricated VCSELs with monolithically integrated pin photodetectors which dynamically monitor (and can thus control) the output power of the lasers. The VCSELs lase at room temperature and emit a highly coherent, low-divergence, circular beam directly from the top surface. The integrated photodetector shows a linear response to the laser emission with an effective responsivity of 0.25 A/W.
引用
收藏
页码：1630 / 1632
页数：3
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