GAS ANALYZER FOR TRACE IMPURITY ANALYSIS

被引：3
|
作者：
ELFORD, MT
MILLOY, HB
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 03期
关键词：
D O I：
10.1116/1.1316995
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1084 / &
相关论文
共 50 条
  • [11] PLASMA CHEMISTRY FOR TRACE IMPURITY ANALYSIS
    SIEGEL, MW
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (02): : 110 - 111
  • [12] A new advanced infrared-based analyzer for fast analysis of ultra trace gas impurities
    Markowski, ML
    Dudek, J
    Lehmann, D
    Rabinowitz, P
    PROCEEDINGS OF THE 46TH ANNUAL ISA ANALYSIS DIVISION SYMPOSIUM, VOL 34, 2001, 410 : 121 - 130
  • [13] Deuterium Gas Analysis by Residual Gas Analyzer
    Das, B. K.
    Shukla, R.
    Das, R.
    Shyam, A.
    Rao, A. D. P.
    INTERNATIONAL SYMPOSIUM ON VACUUM SCIENCE AND TECHNOLOGY AND ITS APPLICATION FOR ACCELERATORS (IVS 2012), 2012, 390
  • [14] Portable gas analyzer-testers for determining the concentration of impurity gases in the atmosphere
    Vinogradov, SV
    Nazarov, VN
    Smirnov, VA
    Shilov, VB
    Litvak, AM
    Maksyutenko, MA
    Nepomnyashchii, SI
    Karpov, SV
    Timofeev, AL
    JOURNAL OF OPTICAL TECHNOLOGY, 1998, 65 (05) : 375 - 378
  • [15] Portable gas analyzer-testers for determining the concentration of impurity gases in the atmosphere
    Vinogradov, S.V.
    Nazarov, V.N.
    Smirnov, V.A.
    Shilov, V.B.
    Litvak, A.M.
    Maksyutenko, M.A.
    Nepomnyashchii, S.I.
    Karpov, S.V.
    Timofeev, A.L.
    Journal of Optical Technology (A Translation of Opticheskii Zhurnal), 1998, 65 (05): : 375 - 378
  • [16] QCL-based trace gas analyzer for industrial and healthcare applications
    Maekawa, A.
    Shiomi, Y.
    Uchida, M.
    Kakuno, T.
    QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XIV, 2017, 10111
  • [17] A MULTISTAGE ANALYZER FOR EXHAUST GAS ANALYSIS
    HURN, RW
    CHASE, JO
    HUGHES, KJ
    ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1959, 72 (13) : 675 - 684
  • [18] ELECTRODES FOR TRACE IMPURITY ANALYSIS AND DETERMINATION OF TRACES IN GALLIUM
    WANG, MS
    APPLIED SPECTROSCOPY, 1970, 24 (01) : 60 - &
  • [19] Background gas analysis with leaky attenuation in a trace moisture analyzer using a ball surface acoustic wave sensor
    Yamanaka, Kazushi
    Akao, Shingo
    Takeda, Nobuo
    Tsuji, Toshihiro
    Oizumi, Toru
    Fukushi, Hideyuki
    Okano, Tatsuhiro
    Tsukahara, Yusuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SG)
  • [20] GAS CHROMATOGRAPHY FOR TRACE ANALYSIS
    BOGGUS, JD
    ADAMS, NG
    ANALYTICAL CHEMISTRY, 1958, 30 (09) : 1471 - 1473
12345