USE OF PHOTOLITHOGRAPHY FOR THE PREPARATION OF Y-BA-CU-O THIN-FILM ELEMENTS

被引：0
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作者：
BAGULYA, AV
KAZAKOV, IP
MIKERTUMYANTS, AR
NEGODAEV, MA
ROMASHCHIN, VA
TSEKHOSH, VI
YURKOV, AN
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来源：
PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1990年 / 16卷 / 16期
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O59 [应用物理学];
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页码：55 / 58
页数：4
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