ADVANCES IN SILICON EPITAXIAL TECHNOLOGY

被引：0
|
作者：
GUPTA, DC
WANG, P
机构：
来源：
SOLID STATE TECHNOLOGY | 1968年 / 11卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：48 / +
页数：1
相关论文
共 50 条
  • [31] Effects of epitaxial silicon technology on the manufacturing performance of wafer fabrication lines
    Hughes, JC
    Neudeck, GW
    Uzsoy, R
    TWENTY THIRD IEEE/CPMT INTERNATIONAL ELECTRONICS MANUFACTURING TECHNOLOGY SYMPOSIUM, 1998, : 333 - 336
  • [32] HIGH-QUALITY EPITAXIAL SILICON LAYERS FORMED BY ULTRACLEAN TECHNOLOGY
    OHMI, T
    YOSHITAKE, S
    MUROTA, J
    OKUMURA, T
    AIKAWA, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C133 - C133
  • [33] Research advances in preparation technology and quality of silicon nitride powder
    Xiang, Maoqiao
    Geng, Yuqi
    Zhu, Qingshan
    Huagong Xuebao/CIESC Journal, 2022, 73 (01): : 73 - 84
  • [34] Recent advances of silicon wafer cutting technology for photovoltaic industry
    Chen, Changyong
    Sun, Meng
    Chen, Xiaoqing
    Wang, Yi
    Jiang, Zhouhua
    Zhou, Jianan
    METALLURGICAL RESEARCH & TECHNOLOGY, 2021, 118 (06)
  • [35] Advances in silicon-on-insulator cellular antenna switch technology
    Mckay, T.
    Carroll, A.
    Kerr, D.
    Costa, J.
    2009 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUTS IN RF SYSTEMS, DIGEST OF PAPERS, 2009, : 156 - +
  • [36] Silicon carbide crystal and substrate technology:: A survey of recent advances
    Hobgood, HM
    Brady, MF
    Calus, MR
    Jenny, JR
    Leonard, RT
    Malta, DP
    Müller, SG
    Powell, AR
    Tsvetkov, VF
    Glass, RC
    Carter, CH
    SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2, 2004, 457-460 : 3 - 7
  • [37] Advances in silicon semiconductor device technology for radio and wireless applications
    Larson, LE
    BOSTON 2003 RADIO & WIRELESS RAWCON CONFERENCE, PROCEEDINGS, 2003, : 353 - 356
  • [38] Advances in silicon carbide science and technology at the micro- and nanoscales
    Maboudian, Roya
    Carraro, Carlo
    Senesky, Debbie G.
    Roper, Christopher S.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (05):
  • [39] Advances in Liquid Crystal on Silicon (LCOS) Spatial Light Modulator Technology
    Bleha, William P.
    Lei, LiJuan Alice
    DISPLAY TECHNOLOGIES AND APPLICATIONS FOR DEFENSE, SECURITY, AND AVIONICS VII, 2013, 8736
  • [40] Advances in silicon carbide composite electroplating technology to replace chromium electroplating
    Huang, Jia-Le
    Wang, Qi-Wei
    Yang, Ying-Fei
    Wang, Xiao-Ming
    Zhao, Yang
    Zhu, Sheng
    Li, Wei
    Surface Technology, 2021, 50 (01): : 130 - 137
12345