MULTIPLE ANGLE ELLIPSOMETRIC ANALYSIS OF SURFACE-LAYERS AND SURFACE-LAYER CONTAMINANTS

被引：19

|

作者：

PEDINOFF, ME ^{[1
]}

STAFSUDD, OM ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,DEPT ELECT ENGN,LOS ANGELES,CA 90024

来源：

APPLIED OPTICS | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1364/AO.21.000518

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：518 / 521

页数：4

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