共 50 条
- [25] ELECTRICAL PROPERTIES OF NONSTOICHIOMETRIC TA2O5 AMERICAN CERAMIC SOCIETY BULLETIN, 1972, 51 (08): : 654 - &
- [27] Electrical properties of thin Ta2O5 films obtained by thermal oxidation of Ta on Si 1997 21ST INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS, VOLS 1 AND 2, 1997, : 613 - 616
- [28] Electrical properties of thin Ta2O5 films obtained by thermal oxidation of Ta on Si MICROELECTRONICS AND RELIABILITY, 1998, 38 (05): : 827 - 832