Technology of Latent Image Writing in Chromium Films in Application to Synthesizing Precision Angle Measuring Structures

被引：0
|
作者：
Kiryanov, A. V. [1 ]
Nikitin, V. G. [1 ]
机构：
[1] Russian Acad Sci, Technol Design Inst Sci Instrument Engn, Siberian Branch, Ul Russkaya 41, Novosibirsk 630058, Russia
来源：
OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2009年 / 45卷 / 01期
关键词：
laser image generator; latent image writing technology; precision angle measuring structures; photoelectric angle encoders;
D O I：
10.1134/S8756699009010129
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Specific sources of the error of forming the angle measuring structure topology by raster scanning based on the thermochemical technology of latent image writing in chromium films are analyzed. Relationship between this type of error and the specific features of dynamics of chromium film heating by laser radiation is found. A structure writing correction algorithm is proposed and implemented. The algorithm ensures an accuracy of synthesizing angle measuring structures of about several seconds of arc.
引用
收藏
页码：75 / 81
页数：7
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