Using the differential method of measurement to control the accuracy of precision angle measuring structures

被引：2
|
作者：
Kiryanov V.P. [1 ]
Kiryanov A.V. [1 ]
Chukanov V.V. [1 ]
机构：
[1] Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk
来源：
Optoelectronics, Instrumentation and Data Processing | 2016年 / 52卷 / 4期
关键词：
air bearing; angle encoder; angle measuring setup; angle measuring structures; differential method of measurement;
D O I：
10.3103/S8756699016040063
中图分类号：
学科分类号：
摘要：
Specific features of monitoring metrological parameters of optical scales, limbs, or code disks are considered. A concept of building an intelligent mechatronic module on the air bearing basis for a high-performance angle measuring machine is proposed. The result is achieved by using the differential method of measurement in the mechatronic module design. This method allows one to determine the contribution of the measuring setup to the resulting error of structures. © 2016, Allerton Press, Inc.
引用
收藏
页码：354 / 359
页数：5
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