DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS

被引:3544
作者
LANG, DV [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.1663719
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3023 / 3032
页数:10
相关论文
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