FOURIER-TRANSFORM METHOD FOR MEASUREMENT OF EPITAXIAL LAYER THICKNESS

被引：0

作者：

COX, PF ^{[1
]}

STALDER, AF ^{[1
]}

机构：

[1] TEXAS INSTR INC,CORP RES,DALLAS,TX 75222

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C98 / &

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