THE INFLUENCE OF ARGON ION-BOMBARDMENT ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF CLEAN SILICON SURFACES

被引：13
|
作者：
MARTENS, JWD
VANDENBOGERT, WF
VANSILFHOUT, A
机构：
来源：
SURFACE SCIENCE | 1981年 / 105卷 / 01期
关键词：
D O I：
10.1016/0039-6028(81)90161-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：275 / 288
页数：14
相关论文
共 50 条
  • [11] ION-BOMBARDMENT OF PLANE SURFACES OF SILICON AT HIGH-TEMPERATURES
    FAURE, J
    CLAVERIE, A
    VIEU, C
    BEAUVILLAIN, J
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1988, 13 (03): : A11 - A11
  • [12] INFLUENCE OF ION-IMPLANTATION ON THE OPTICAL-PROPERTIES OF SILICON
    WESCH, W
    GOTZ, G
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 49 (1-3): : 137 - 140
  • [13] Influence of argon ion bombardment on the oxidation of nickel surfaces
    deJesus, JC
    Pereira, P
    Carrazza, J
    Zaera, F
    SURFACE SCIENCE, 1996, 369 (1-3) : 217 - 230
  • [14] DEEP CENTERS INTRODUCED BY ARGON ION-BOMBARDMENT IN N-TYPE SILICON
    GARRIDO, J
    CALLEJA, E
    PIQUERAS, J
    SOLID-STATE ELECTRONICS, 1981, 24 (12) : 1121 - 1126
  • [15] OPTICAL AND ELECTRICAL-PROPERTIES OF THIN SILVER FILMS GROWN UNDER ION-BOMBARDMENT
    PARMIGIANI, F
    KAY, E
    HUANG, TC
    PERRIN, J
    JURICH, M
    SWALEN, JD
    PHYSICAL REVIEW B, 1986, 33 (02) : 879 - 888
  • [16] INFLUENCE OF ARGON PARTIAL-PRESSURE ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF SPUTTERED HYDROGENATED AMORPHOUS-SILICON
    SWANEPOEL, R
    SWART, PL
    AHARONI, H
    THIN SOLID FILMS, 1985, 128 (3-4) : 191 - 203
  • [17] THE NEON AUGER SPECTRUM PRODUCED BY ION-BOMBARDMENT OF ALUMINUM AND SILICON SURFACES
    GALLON, TE
    NIXON, AP
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1992, 4 (49) : 9761 - 9768
  • [18] CONTAMINATION LAYERS FORMED BY ARGON ION-BOMBARDMENT
    SHIMIZU, K
    KAWAKATSU, H
    KANAYA, K
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (13) : 1453 - 1459
  • [19] BEHAVIOR OF SURFACES UNDER ION-BOMBARDMENT
    MCCRACKEN, GM
    REPORTS ON PROGRESS IN PHYSICS, 1975, 38 (02) : 241 - &
  • [20] OPTICAL-EMISSIONS FROM SPUTTERING SPECIES FORMED BY THE FAST ION-BOMBARDMENT OF CLEAN AND OXYGENATED MG SURFACES
    FOURNIER, PG
    FOURNIER, J
    BELLAOUI, B
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 67 (1-4): : 604 - 609
12345