THE INFLUENCE OF ARGON ION-BOMBARDMENT ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF CLEAN SILICON SURFACES

被引：13
|
作者：
MARTENS, JWD
VANDENBOGERT, WF
VANSILFHOUT, A
机构：
来源：
SURFACE SCIENCE | 1981年 / 105卷 / 01期
关键词：
D O I：
10.1016/0039-6028(81)90161-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：275 / 288
页数：14
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