NANOMETER X-RAY MASK CREATED USING PRECISE CRYSTAL-GROWTH

被引：0
|
作者：
FURUYA, K
MIYAMOTO, Y
YAMAZAKI, D
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1992年 / 127期
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D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Fabrication possibility of X-ray masks with nanometer size patterns by precise crystal growth techniques is discussed. As a preliminary experiment, using GaInAs/InP layered structure grown by OMVPE, 100nm-patterns were transferred by X-ray.
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页码：119 / 122
页数：4
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