APFIM STUDIES OF COMPOSITIONAL INHOMOGENEITY IN SPUTTERED CO-CR THIN-FILMS

被引：14

作者：

HONO, K ^{[1
]}

MAEDA, Y ^{[1
]}

LI, JL ^{[1
]}

SAKURAI, T ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, BASIC RES LABS, TOKAI, IBARAKI 31911, JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281289

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Atom probe analysis results of Co-22at%CR bulk alloy and its thin films are presented. While no compositional inhomogeneity is detected from the bulk sample, a significant compositional fluctuation is present in the thin film specimen which is sputter deposited on a heated substrate. The concentration of the Cr enriched region is in the range of 30 - 40 at.%Cr, while that of the Cr depleted region is approximately 5 at.%Cr. Such compositional fluctuations are present within a grain. These results are in agreement with NMR and TEM results.

引用

页码：3745 / 3747

页数：3

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