METALORGANIC CHEMICAL VAPOR-DEPOSITION USING A SINGLE SOLUTION SOURCE FOR HIGH-JC Y1BA2CU3O7-X SUPERCONDUCTING FILMS

被引:52
|
作者
MATSUNO, S [1 ]
UCHIKAWA, F [1 ]
UTSUNOMIYA, S [1 ]
NAKABAYASHI, S [1 ]
机构
[1] SUPER GM,KITA KU,OSAKA 530,JAPAN
关键词
D O I
10.1063/1.106994
中图分类号
O59 [应用物理学];
学科分类号
摘要
High JcY1Ba2CU3O7-x superconducting thin and thick films were prepared onto SrTiO3 (100) substrates at 700-degrees-C by metalorganic chemical vapor deposition (MOCVD) technique using a single solution source. A mixture of Y, Ba, and Cu beta-diketonate chelates was dissolved in tetrahydrofuran as a solution source. Zero resistance transition temperature and critical current density at 77 K, 0 T for thin and thick films were 90 K and 2.73 X 10(6) A/cm2, 91 K and 3.1 X 10(5) A/cm2, respectively. X-ray diffraction measurement indicated that the thin film grew epitaxially with the c-axis orientation perpendicular to the surface of the substrate and the thick films mainly consisted of a-axis orientation.
引用
收藏
页码:2427 / 2429
页数:3
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